MIMC reliability and electrical behavior defined by a physical layer property of the dielectric

0026-2714/$ see front matter 2008 Elsevier Ltd. A doi:10.1016/j.microrel.2008.06.043 * Corresponding author. Tel.: +32 55 332343. E-mail address: [email protected] (J. Ackae Metal–insulator–metal capacitor (MIMC) reliability and electrical properties are defined by the TDDB lifetime, breakdown voltage and leakage current. In this article, the correlation is determined between these electrical properties and the physical and chemical properties of the SiN dielectric layer. It is demonstrated how a SiN dielectrics with a high refractive index have high Si content and show an increased initial leakage current. However, contradictory to the high leakage current, these dielectrics also show high lifetimes. It is shown that SiN dielectrics with a high Si content contain high numbers of charge trapping centers. Over time, a high concentration of trapped charges is build up to such an extend that the local electric field over the dielectric is significantly decreased. This results in the observed reliability improvement of the dielectric. The final intrinsic quality and reliability of MIMC capacitors can therefore be determined by measurable physical properties of the MIMC dielectric at the time of the deposition of this layer. 2008 Elsevier Ltd. All rights reserved.